Invention Grant
- Patent Title: Semiconductor device having trench capacitor structure integrated therein
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Application No.: US13716381Application Date: 2012-12-17
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Publication No.: US09608130B2Publication Date: 2017-03-28
- Inventor: Khanh Tran , Joseph P. Ellul , Edward M. Godshalk , Kiyoko Ikeuchi , Anuranjan Srivastava
- Applicant: Maxim Integrated Products, Inc.
- Applicant Address: US CA San Jose
- Assignee: Maxim Integrated Products, Inc.
- Current Assignee: Maxim Integrated Products, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Advent, LLP
- Main IPC: H01L29/92
- IPC: H01L29/92 ; H01L29/66 ; H01L49/02

Abstract:
Semiconductor devices are described that include a capacitor integrated therein. In an implementation, the semiconductor devices include a substrate. The substrate includes multiple capacitor regions, such as a first capacitor region and a second capacitor region that are adjacent to one another. Each capacitor region includes trenches that are formed within the substrate. A metal-insulator-metal capacitor is formed within the trenches and at least partially over the substrate. The trenches disposed within the first capacitor region are at least substantially perpendicular to the trenches disposed within the second capacitor region.
Public/Granted literature
- US20130161792A1 SEMICONDUCTOR DEVICE HAVING TRENCH CAPACITOR STRUCTURE INTEGRATED THEREIN Public/Granted day:2013-06-27
Information query
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