- Patent Title: Method of forming acoustic resonator using intervening seed layer
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Application No.: US12911986Application Date: 2010-10-26
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Publication No.: US09608589B2Publication Date: 2017-03-28
- Inventor: Kevin J. Grannen , Chris Feng , Phil Nikkel , John Choy
- Applicant: Kevin J. Grannen , Chris Feng , Phil Nikkel , John Choy
- Applicant Address: SG Singapore
- Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
- Current Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: H03H3/02
- IPC: H03H3/02 ; H01L41/314 ; H01L41/317 ; H03H9/17

Abstract:
A method of forming an acoustic resonator includes forming a seed layer on a first electrode layer, forming a piezoelectric layer directly on a surface of the seed layer, and forming a second electrode layer on the piezoelectric layer. The piezoelectric layer includes multiple crystals of piezoelectric material, and the seed layer causes crystal axis orientations of the crystals to be substantially perpendicular to the surface of the seed layer.
Public/Granted literature
- US20120096697A1 METHOD OF FORMING ACOUSTIC RESONATOR USING INTERVENING SEED LAYER Public/Granted day:2012-04-26
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