Invention Grant
- Patent Title: Metal-safe solid form aqueous-based compositions and methods to remove polymeric materials in electronics manufacturing
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Application No.: US14425750Application Date: 2013-09-02
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Publication No.: US09611451B2Publication Date: 2017-04-04
- Inventor: John Cleaon Moore , Richard Tsai , Frank Chiu
- Applicant: John Moore
- International Application: PCT/US2013/057760 WO 20130902
- International Announcement: WO2014/039409 WO 20140313
- Main IPC: C11D3/08
- IPC: C11D3/08 ; C11D3/10 ; C11D3/26 ; C11D11/00 ; G03F7/42 ; C11D3/30 ; C11D3/04 ; C11D3/33 ; C11D3/00 ; C11D3/12 ; C11D3/28 ; C11D1/00

Abstract:
Compositions and methods useful for the removal of organic substances from substrates, for example, electronic device substrates, are provided. A method is presented which uses a minimum amount of solid form concentrate that is diluted into water, introduced into a manufacturing tool and heated, applied to said substrate for a sufficient time to allow penetration and removal of an organic substance, and immediately rinsed with water to achieve complete removal. These compositions and methods are particularly suitable for removing and completely dissolving photoresists of the positive variety most commonly used in the manufacture of a flat panel display (FPD) and other electronic substrates.
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