Invention Grant
- Patent Title: Method for making nanostructures
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Application No.: US14549567Application Date: 2014-11-21
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Publication No.: US09611536B2Publication Date: 2017-04-04
- Inventor: Yuan-Hao Jin , Qun-Qing Li , Shou-Shan Fan
- Applicant: Tsinghua University , HON HAI PRECISION INDUSTRY CO., LTD.
- Applicant Address: CN Beijing TW New Taipei
- Assignee: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- Current Assignee: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- Current Assignee Address: CN Beijing TW New Taipei
- Agent Zhigang Ma
- Priority: CN201310607739 20131127
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C14/58 ; C23C16/01 ; C23C16/56 ; C23C14/06 ; H01L33/42

Abstract:
A method of making nanostructures includes following steps. A carbon nanotube structure is suspended, wherein the carbon nanotube structure includes a number of carbon nanotubes orderly aligned. A carbon nanotube composite structure is formed by applying a precoated layer on the carbon nanotube structure, wherein a thickness of the precoated layer on an outer surface of each of the number of carbon nanotubes ranges from about 2 nanometers to about 10 nanometers. The carbon nanotube composite structure is transferred on a substrate and treating the carbon nanotube composite structure with a solution. The carbon nanotube structure is removed by annealing the carbon nanotube composite structure in an annealing temperature from about 500° C. to about 700° C., wherein the precoated layer is softened and contracted.
Public/Granted literature
- US20150145162A1 METHOD FOR MAKING NANOSTRUCTURES Public/Granted day:2015-05-28
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