Invention Grant
- Patent Title: Target shaping
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Application No.: US13032922Application Date: 2011-02-23
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Publication No.: US09611537B2Publication Date: 2017-04-04
- Inventor: Stanislav Kadlec , Jürgen Weichart
- Applicant: Stanislav Kadlec , Jürgen Weichart
- Applicant Address: CH Trubbach
- Assignee: EVATEC AG
- Current Assignee: EVATEC AG
- Current Assignee Address: CH Trubbach
- Agency: Pearne & Gordon LLP
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C14/34

Abstract:
A target for a physical vapor deposition system includes a top, a bottom, and a base. The base essentially is defined by the surface of the target to be sputtered. A first, inner ring and a second, outer ring extend from the base. Each ring has an inner side and an outer side, wherein sputtering is concentrated on the outer sides by means of a magnet arrangement adjacent to the target.
Public/Granted literature
- US20110203920A1 TARGET SHAPING Public/Granted day:2011-08-25
Information query
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