Invention Grant
- Patent Title: Electroplating cell and tool
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Application No.: US11852707Application Date: 2007-09-10
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Publication No.: US09611561B2Publication Date: 2017-04-04
- Inventor: Trifon M. Liakopoulos , Robert W. Filas , Amrit Panda
- Applicant: Trifon M. Liakopoulos , Robert W. Filas , Amrit Panda
- Applicant Address: US NJ Bridgewater
- Assignee: Enpirion, Inc.
- Current Assignee: Enpirion, Inc.
- Current Assignee Address: US NJ Bridgewater
- Agency: Fletcher Yoder, P.C.
- Main IPC: C25B1/04
- IPC: C25B1/04 ; C25B9/00 ; C25D17/06 ; C25D17/00 ; C25D17/08 ; C25D21/12 ; C25D17/02 ; C25D13/22 ; C25D3/56 ; C25D17/12 ; C25D21/10 ; C25D21/11 ; C25D5/00

Abstract:
An electroplating cell employable with an electroplating tool and method of operating the same. In one embodiment, the electroplating cell includes a cover configured to substantially seal the electroplating cell to an outside atmosphere during an electroplating process, and a porous tube couplable to an inert gas source configured to bubble an inert gas through an electrolyte containable therein. The electroplating cell also includes an anode, encased in an envelope of a semipermeable membrane, formed with an alloy of electroplating material, and a magnet configured to orient an axis of magnetization of the electroplating material for application to a wafer couplable thereto during an electroplating process.
Public/Granted literature
- US20090065363A1 Electroplating Cell and Tool Public/Granted day:2009-03-12
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