Invention Grant
- Patent Title: Plating method and plating apparatus
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Application No.: US15096972Application Date: 2016-04-12
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Publication No.: US09611563B2Publication Date: 2017-04-04
- Inventor: Yoshio Minami , Jumpei Fujikata , Takashi Kishi
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2012-071546 20120327
- Main IPC: C25D17/00
- IPC: C25D17/00 ; C25D17/06 ; C25D21/12

Abstract:
A plating method includes holding a substrate with a substrate holder while bringing a sealing member into pressure contact with a peripheral portion of the substrate to form an enclosed internal space in the substrate holder; performing a first-stage leakage test of the substrate holder by producing a vacuum in the internal space and checking whether pressure in the internal space reaches a predetermined vacuum pressure within a certain period of time; and if the substrate holder has passed the first-stage leakage test, performing a second-stage leakage test of the substrate holder by closing off the internal space after producing the vacuum therein and checking whether a change in the pressure in the internal space reaches a predetermined value within a certain period of time.
Public/Granted literature
- US20160222540A1 PLATING METHOD AND PLATING APPARATUS Public/Granted day:2016-08-04
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