Invention Grant
- Patent Title: Optical system and optical quality measuring apparatus
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Application No.: US14630950Application Date: 2015-02-25
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Publication No.: US09612112B2Publication Date: 2017-04-04
- Inventor: Hiroyuki Yuki , Takashi Seki
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2014-038060 20140228
- Main IPC: G01B11/30
- IPC: G01B11/30 ; G01N21/55 ; G01N21/57

Abstract:
An optical system comprising: a light source; a photodetector; a first light-receiving system for causing the photodetector to receive first reflected light with a first angle of reflection from a surface; and a second light-receiving system for causing the photodetector to receive second reflected light with a second angle of reflection, different from the first angle of reflection, from the surface is provided. Here, an incident area on the surface, in which light generating the first reflected light is incident, is spaced apart from an exiting area on the surface, which light, to be incident on the photodetector from the surface via the second light-receiving system, exits.
Public/Granted literature
- US20150247724A1 OPTICAL SYSTEM AND OPTICAL QUALITY MEASURING APPARATUS Public/Granted day:2015-09-03
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