Invention Grant
- Patent Title: Full information acquisition in scanning probe microscopy and spectroscopy
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Application No.: US15063144Application Date: 2016-03-07
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Publication No.: US09612257B1Publication Date: 2017-04-04
- Inventor: Stephen Jesse , Alex Belianinov , Sergei V. Kalinin , Suhas Somnath
- Applicant: UT-Battelle, LLC
- Applicant Address: US TN Oak Ridge
- Assignee: UT-Battelle, LLC
- Current Assignee: UT-Battelle, LLC
- Current Assignee Address: US TN Oak Ridge
- Agency: Brinks Gilson & Lione
- Main IPC: G01Q30/04
- IPC: G01Q30/04

Abstract:
Apparatus and methods are described for scanning probe microscopy and spectroscopy based on acquisition of full probe response. The full probe response contains valuable information about the probe-sample interaction that is lost in traditional scanning probe microscopy and spectroscopy methods. The full probe response is analyzed post data acquisition using fast Fourier transform and adaptive filtering, as well as multivariate analysis. The full response data is further compressed to retain only statistically significant components before being permanently stored.
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