Invention Grant
- Patent Title: Probe card and test apparatus including the same
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Application No.: US14187541Application Date: 2014-02-24
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Publication No.: US09612274B2Publication Date: 2017-04-04
- Inventor: Jun-Hee Lee , Jong-Hyun Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2013-0019628 20130225
- Main IPC: G01R31/28
- IPC: G01R31/28

Abstract:
A probe card including a multi-layered substrate, a plurality of needles, and a temperature controlling unit may be provided. The multi-layered substrate may include a test pattern through which a test current passes. The needles may be provided on the multi-layered substrate. The needles may be electrically connected to the test pattern and may be configured to contact an object so that the test current may be supplied to the object. The temperature controlling unit may provide the multi-layered substrate with at least one of a first temperature and a second temperature, the first temperature being higher than the second temperature. Thus, a time for setting a test temperature may be shortened. As a result, thermal deformation of the probe card and/or the object may be reduced or suppressed, and thus reliability of test result may be improved.
Public/Granted literature
- US20140239992A1 PROBE CARD AND TEST APPARATUS INCLUDING THE SAME Public/Granted day:2014-08-28
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