Invention Grant
- Patent Title: Wire grid polarizer and method of fabricating the same
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Application No.: US14704667Application Date: 2015-05-05
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Publication No.: US09612379B2Publication Date: 2017-04-04
- Inventor: Eun Ae Kwak , Min Hyuck Kang , Hyeong Gyu Jang
- Applicant: Samsung Display Co. Ltd.
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2014-0182935 20141218
- Main IPC: H01L27/12
- IPC: H01L27/12 ; G02B5/30 ; G02B1/18 ; G02F1/1335

Abstract:
A method of fabricating a wire grid polarizer includes sequentially forming a conductive layer, a guide layer, and a surface treatment protection layer on a substrate, patterning the surface treatment protection layer and the guide layer, forming a surface treatment film on side surfaces and upper surfaces of the first and second patterns, removing the first and second surface treatment protection patterns from the respective first and second patterns on which the surface treatment film is formed, to expose upper surfaces of the first and second guide patterns and providing a block copolymer of two monomers having mutually different etch rates into a space defined by the conductive layer and the first and second guide patterns, wherein a transfer layer which is hydrophobic to the block copolymer of two monomers is formed on the upper surfaces of the first and second guide patterns.
Public/Granted literature
- US20160178822A1 WIRE GRID POLARIZER AND METHOD OF FABRICATING THE SAME Public/Granted day:2016-06-23
Information query
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