Invention Grant
- Patent Title: Pellicle frame and a pellicle
-
Application No.: US14826378Application Date: 2015-08-14
-
Publication No.: US09612529B2Publication Date: 2017-04-04
- Inventor: Kazutoshi Sekihara
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2014-192378 20140922
- Main IPC: G03F1/64
- IPC: G03F1/64 ; G03F1/62

Abstract:
A pellicle is proposed in which the frame is formed with an external horizontal slit for the purpose of receiving a pressing means, which can urge the pellicle to be adhered to a photomask, in which the slit forms a vertically protruding part of a thickness of 5-30% of the width of a pellicle frame main body and a horizontally protruding part of a thickness of 0.3-1 mm; also the method of adhering the pellicle to the photomask is proposed.
Public/Granted literature
- US20160085147A1 PELLICLE FRAME AND A PELLICLE Public/Granted day:2016-03-24
Information query