Method for determining a machining means in hybrid ultraprecision machining device, and hybrid ultraprecision machining device
Abstract:
There is provided a method for determining a machining means in a hybrid ultraprecision machining device for manufacturing a micro-machined product from a workpiece, the machining device comprising: an electromagnetic-wave-machining means for roughly machining the workpiece; a precision-machining means for precisely machining the roughly machined workpiece; and a shape-measurement means for measuring a shape of the workpiece upon use of the electromagnetic-wave machining means and the precision-machining means, wherein a choice is made between the electromagnetic-wave-machining means and the precision-machining means in the determination of the machining means, on the basis of: information on a stereoscopic model of the micro-machined product; information on a removal volume to be removed from a volume of the workpiece in the manufacturing of the micro-machined product; and data on a removal process time of the electromagnetic-wave-machining means and data on a removal process time of the precision-machining means.
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