Invention Grant
- Patent Title: Systems, methods and computer program products for signature detection
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Application No.: US14673712Application Date: 2015-03-30
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Publication No.: US09613255B2Publication Date: 2017-04-04
- Inventor: Moshe Amzaleg , Ariel Shkalim , Efrat Rozenman
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel Ltd.
- Current Assignee: Applied Materials Israel Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G06K9/62
- IPC: G06K9/62 ; G06K9/00 ; G06F3/048

Abstract:
Methods, systems, and computer program products for signature detection. One example of a method includes: acquiring an article defect density map comprising a plurality of sections corresponding to a first resolution level which is indicative of defect numbers for the sections, and determining a distribution representative of the defect numbers or function thereof; determining a threshold in accordance with said distribution, and identifying sections, out of said plurality of sections in the article defect density map, with defect numbers or function thereof above the threshold; and clustering at least part of adjoining identified sections, into one or more signatures, thus detecting said one or more signatures.
Public/Granted literature
- US20160292492A1 SYSTEMS, METHODS AND COMPUTER PROGRAM PRODUCTS FOR SIGNATURE DETECTION Public/Granted day:2016-10-06
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