Invention Grant
- Patent Title: Immersion de-taping
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Application No.: US14158503Application Date: 2014-01-17
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Publication No.: US09613845B2Publication Date: 2017-04-04
- Inventor: Ching Tasi Liu , Fu-Chen Chang , Chien-Chen Li , Te Lung Liu , Kuo Liang Lu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: B29C65/50
- IPC: B29C65/50 ; B32B37/12 ; B32B38/10 ; B32B39/00 ; H01L21/683

Abstract:
Embodiments using immersion de-taping are described. A substrate having a substrate tape attached thereto is provided. The substrate includes electrically conductive connectors attached to the substrate tape. A fluid is provided between the substrate and the substrate tape. While the fluid is between the substrate and the substrate tape, the substrate tape is removed from the substrate. Another embodiment is an apparatus comprising an immersion tank, a substrate chuck, first and second fixed rollers, and a moveable roller. The substrate chuck is configured to secure a substrate and to place the substrate into the immersion tank. The first fixed roller is operable to dispense a clamp tape. The second fixed roller is operable to roll the clamp tape. The moveable roller is operable to extend into the immersion tank and to adhere the clamp tape to a substrate tape on the substrate.
Public/Granted literature
- US20150206784A1 IMMERSION DE-TAPING Public/Granted day:2015-07-23
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