Invention Grant
- Patent Title: Method for manufacturing interconnect structures incorporating air gap spacers
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Application No.: US14846800Application Date: 2015-09-06
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Publication No.: US09613851B2Publication Date: 2017-04-04
- Inventor: Satya V. Nitta , Shom Ponoth
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: The Law Offices of Robert J. Eichelburg
- Agent Robert J. Eichelburg
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L21/768 ; H01L21/311

Abstract:
A dual damascene article of manufacture comprises a trench containing a conductive metal column where the trench and the conductive metal column extend down into and are contiguous with a via. The trench and the conductive metal column and the via have a common axis. These articles comprise interconnect structures incorporating air-gap spacers containing metal/insulator structures for Very Large Scale Integrated (VLSI) and Ultra Large Scale Integrated (ULSI) devices and packaging. The trench in this regard comprises a sidewall air-gap immediately adjacent the side walls of the trench and the conductive metal column, the sidewall air-gap extending down to the via to a depth below a line fixed by the bottom of the trench, and continues downward in the via for a distance of from about 1 Angstrom below the line to the full depth of the via. In another aspect, the article of manufacture comprises a capped dual damascene structure.
Public/Granted literature
- US20160027686A1 METHOD FOR MANUFACTURING INTERCONNECT STRUCTURES INCORPORATING AIR GAP SPACERS Public/Granted day:2016-01-28
Information query
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