Invention Grant
- Patent Title: Semiconductor memory device with conductive columnar body
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Application No.: US14730640Application Date: 2015-06-04
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Publication No.: US09613896B2Publication Date: 2017-04-04
- Inventor: Kotaro Noda
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Minato-ku
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L23/522 ; H01L27/11524 ; H01L27/1157 ; H01L23/528 ; H01L27/24 ; H01L27/11578 ; H01L27/11551 ; H01L21/822 ; H01L27/06

Abstract:
A semiconductor memory device according to an embodiment comprises: when three directions intersecting each other are assumed to be first through third directions, and two directions intersecting each other in a plane extending in the first and second directions are assumed to be fourth and fifth directions, a memory cell array including: a conductive layer stacked in the third direction above a semiconductor substrate and having a first region; and a first columnar body penetrating the first region of the conductive layer in the third direction and including a semiconductor film, the first columnar body having a cross-section along the first and second directions in which, at a first position which is a certain position in the third direction, a length in the fourth direction is shorter than a length in the fifth direction.
Public/Granted literature
- US20160276264A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2016-09-22
Information query
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