Invention Grant
- Patent Title: Three-dimensional semiconductor memory device
-
Application No.: US14657235Application Date: 2015-03-13
-
Publication No.: US09613976B2Publication Date: 2017-04-04
- Inventor: Yoshiro Shimojo , Masaru Kito , Yoshihiro Yanai
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/11582 ; H01L27/11565

Abstract:
In general, according to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a semiconductor pillar, a memory film, a partitioning member, a first interlayer insulating film, and a first plug. The stacked body is provided on the substrate, and including a plurality of electrode films and a plurality of insulating films. The semiconductor pillar is provided in the stacked body. The partitioning member is provided in the stacked body. The first plug is connected to the semiconductor pillar. A central axis of the first plug is shifted from a central axis of the semiconductor pillar so as to approach the nearest partitioning member.
Public/Granted literature
- US20160071875A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2016-03-10
Information query
IPC分类: