Invention Grant
- Patent Title: Fractal structures for MEMS variable capacitors
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Application No.: US14239346Application Date: 2012-08-21
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Publication No.: US09614024B2Publication Date: 2017-04-04
- Inventor: Amro M. Elshurafa , Ahmed Gomaa Ahmed Radwan , Ahmed A. Emira , Khaled Nabil Salama
- Applicant: Amro M. Elshurafa , Ahmed Gomaa Ahmed Radwan , Ahmed A. Emira , Khaled Nabil Salama
- Applicant Address: SA Thuwal
- Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: SA Thuwal
- Agency: Thomas | Horstemeyer, LLP
- International Application: PCT/US2012/051733 WO 20120821
- International Announcement: WO2013/028696 WO 20130228
- Main IPC: H01G5/00
- IPC: H01G5/00 ; H01G7/00 ; H01L49/02 ; H01G5/18 ; H01G5/16 ; H01G13/00

Abstract:
In accordance with the present disclosure, one embodiment of a fractal variable capacitor comprises a capacitor body in a microelectromechanical system (MEMS) structure, wherein the capacitor body has an upper first metal plate with a fractal shape separated by a vertical distance from a lower first metal plate with a complementary fractal shape; and a substrate above which the capacitor body is suspended.
Public/Granted literature
- US20140240894A1 FRACTAL STRUCTURES FOR MEMS VARIABLE CAPACITORS Public/Granted day:2014-08-28
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