Invention Grant
- Patent Title: Trench-gate type semiconductor device and manufacturing method therefor
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Application No.: US14930373Application Date: 2015-11-02
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Publication No.: US09614029B2Publication Date: 2017-04-04
- Inventor: Yasuhiro Kagawa , Akihiko Furukawa , Shiro Hino , Hiroshi Watanabe , Masayuki Imaizumi
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Chiyoda-ku
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-275289 20101210
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/06 ; H01L29/16 ; H01L29/417 ; H01L29/739 ; H01L29/78 ; H01L29/10 ; H01L29/20 ; H01L29/423

Abstract:
There is provided a trench-gate type semiconductor device that can prevent breakdown of a gate insulating film caused by a displacement current flowing into a protective diffusion layer at a portion of a trench underlying a gate electrode at a turn-off time and simultaneously improves a current density by narrowing a cell pitch. The semiconductor device has a gate electrode 7 embedded into a trench 5 penetrating a base region 3. The gate electrode 7 is disposed into a lattice shape in a planar view, and a protective diffusion layer 13 is formed in a drift layer 2a at the portion underlying thereof. At least one of blocks divided by the gate electrode 7 is a protective contact region 20 on which the trench 5 is entirely formed. A protective contact 21 for connecting the protective diffusion layer 13 at a bottom portion of the trench 5 and a source electrode 9 is disposed on the protective contact region 20.
Public/Granted literature
- US20160071922A1 TRENCH-GATE TYPE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR Public/Granted day:2016-03-10
Information query
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