Invention Grant
- Patent Title: Fin tunnel field effect transistor (FET)
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Application No.: US13922638Application Date: 2013-06-20
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Publication No.: US09614049B2Publication Date: 2017-04-04
- Inventor: Krishna Bhuwalka
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsin-Chu
- Agency: Cooper Legal Group, LLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L31/0352 ; H01L29/739 ; H01L29/205

Abstract:
A fin tunnel field effect transistor includes a seed region and a first type region disposed above the seed region. The first type region includes a first doping. The fin tunnel field effect transistor includes a second type region disposed above the first type region. The second type region includes a second doping that is opposite the first doping. The fin tunnel field effect transistor includes a gate insulator disposed above the second type region and a gate electrode disposed above the gate insulator. A method for forming an example fin tunnel field effect transistor is provided.
Public/Granted literature
- US20140374799A1 FIN TUNNEL FIELD EFFECT TRANSISTOR (FET) Public/Granted day:2014-12-25
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