Invention Grant
- Patent Title: Semiconductor device, and manufacturing method for same
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Application No.: US15245570Application Date: 2016-08-24
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Publication No.: US09614073B2Publication Date: 2017-04-04
- Inventor: Kenichi Yoshimochi
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Rabin & Berdo, P.C.
- Priority: JP2010-132332 20100609
- Main IPC: H01L23/62
- IPC: H01L23/62 ; H01L29/78 ; H01L29/06 ; H01L29/423 ; H01L29/49 ; H01L29/417 ; H01L29/66

Abstract:
A semiconductor device that has a source region, a channel region, and a drain region disposed in order from a surface of the semiconductor device in a thickness direction of a semiconductor substrate. The semiconductor device includes a gate insulating film having an extended portion that covers the surface of the semiconductor substrate outside of a gate trench and a top surface of a polysilicon gate. A connection gate trench branches from the gate trench, and joins a contact gate trench which is wider than the gate trench and the connection gate trench. The polysilicon gate is embedded in the connection gate trench and the contact gate, and extends from the gate trench to the contact gate trench through the connection gate trench. The gate contact groove is formed in the polysilicon gate within the contact gate trench.
Public/Granted literature
- US20160365442A1 SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD FOR SAME Public/Granted day:2016-12-15
Information query
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