Invention Grant
- Patent Title: Quantum capacitance graphene varactors and fabrication methods
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Application No.: US14720370Application Date: 2015-05-22
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Publication No.: US09614107B2Publication Date: 2017-04-04
- Inventor: Zhihong Chen , Shu-Jen Han , Siyuranga O. Koswatta , Alberto Valdes Garcia
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Daniel P. Morris
- Main IPC: H01L29/93
- IPC: H01L29/93 ; H01L49/02 ; B82Y10/00 ; H01L29/16 ; B82Y40/00

Abstract:
A plate varactor includes a dielectric substrate and a first electrode embedded in a surface of the substrate. A capacitor dielectric layer is disposed over the first electrode, and a layer of graphene is formed over the dielectric layer to contribute a quantum capacitance component to the dielectric layer. An upper electrode is formed on the layer of graphene. Other embodiments and methods for fabrication are also included.
Public/Granted literature
- US20150255631A1 QUANTUM CAPACITANCE GRAPHENE VARACTORS AND FABRICATION METHODS Public/Granted day:2015-09-10
Information query
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