Invention Grant
- Patent Title: Optical substrate, semiconductor light-emitting element and method of manufacturing semiconductor light-emitting element
-
Application No.: US14389968Application Date: 2013-03-29
-
Publication No.: US09614136B2Publication Date: 2017-04-04
- Inventor: Jun Koike , Yoshimichi Mitamura , Fujito Yamaguchi
- Applicant: ASAHI KASEI KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: ASAHI KASEI KABUSHIKI KAISHA
- Current Assignee: ASAHI KASEI KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2012-084208 20120402; JP2012-103489 20120427; JP2012-103490 20120427; JP2012-227295 20121012; JP2012-267377 20121206; JP2012-267488 20121206; JP2012-280241 20121221
- International Application: PCT/JP2013/059635 WO 20130329
- International Announcement: WO2013/150984 WO 20131010
- Main IPC: H01L33/58
- IPC: H01L33/58 ; H01L33/22 ; H01L21/66 ; H01L33/32 ; H01L21/02 ; H01L33/00 ; H01L33/20

Abstract:
In an optical substrate (1), a concave-convex structure (12) including a plurality of independent convex portions (131 to 134) and concave portions (14) provided between the convex portions (131 to 134) is provided in a surface. The average interval Pave between the adjacent convex portions (131 to 134) in the concave-convex structure (12) satisfies 50 nm≦Pave≦1500 nm, and the convex portion (133) having a convex portion height hn satisfying 0.6 h≧hn≧0 h for the average convex portion height Have is present with a probability Z satisfying 1/10000≦Z≦1/5. When the optical substrate (1) is used in a semiconductor light-emitting element, dislocations in a semiconductor layer are dispersed to reduce the dislocation density, and thus internal quantum efficiency IQE is improved, and a waveguide mode is removed by light scattering and thus the light the extraction efficiency LEE is increased, with the result that the efficiency of light emission of the semiconductor light-emitting element is enhanced.
Public/Granted literature
Information query
IPC分类: