Invention Grant
- Patent Title: Vapor deposition apparatus, vapor deposition method, and method for producing organic electroluminescent element
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Application No.: US14903603Application Date: 2014-03-04
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Publication No.: US09614155B2Publication Date: 2017-04-04
- Inventor: Yoshiyuki Isomura , Katsuhiro Kikuchi , Shinichi Kawato , Satoshi Inoue , Takashi Ochi , Yuhki Kobayashi , Eiichi Matsumoto , Masahiro Ichihara
- Applicant: Sharp Kabushiki Kaisha
- Applicant Address: JP Osaka-shi
- Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee Address: JP Osaka-shi
- Agency: Morrison & Foester LLP
- Priority: JP2013-142888 20130708
- International Application: PCT/JP2014/055407 WO 20140304
- International Announcement: WO2015/004945 WO 20150115
- Main IPC: H01L51/00
- IPC: H01L51/00 ; C23C14/04 ; C23C14/12 ; C23C16/458 ; H01L51/50 ; H01L27/32
Abstract:
The vapor deposition apparatus employs scanning vapor deposition, and includes a limiting component including a first plate portion; a second plate portion provided with a space from the first plate portion; and a joint portion combining the first plate portion with the second plate portion, the first plate portion being provided with an first opening, the second plate portion being provided with an second opening that faces the first opening, the vapor deposition apparatus including a first space between the first opening and the second opening, the vapor deposition apparatus including a second space between the first plate portion and the second plate portion, the first space being connected to the second space, the vapor deposition apparatus including a third space that is in the outside of the limiting component, the second space being connected to the third space.
Public/Granted literature
Information query
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