Invention Grant
- Patent Title: Scalable biochip and method for making
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Application No.: US13790828Application Date: 2013-03-08
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Publication No.: US09616617B2Publication Date: 2017-04-11
- Inventor: Wei-Cheng Shen , Yi-Shao Liu , Yi-Hsien Chang , Chun-Ren Cheng
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: B01L3/00
- IPC: B01L3/00 ; B29C65/72 ; G01N27/414

Abstract:
The present disclosure provides a biochip and methods of fabricating. The biochip includes a fluidic part and a sensing part bonded together using a polymer. The fluidic part has microfluidic channel pattern on one side and fluidic inlet and fluidic outlet on the other side that are fluidly connected to the microfluidic channel pattern. The fluidic inlet and fluidic outlet are formed by laser drilling after protecting the microfluidic channel pattern with a sacrificial protective layer. The polymer bonding is performed at low temperature without damaging patterned surface chemistry on a sensing surface of the sensing part.
Public/Granted literature
- US20140256030A1 Scalable Biochip and Method for Making Public/Granted day:2014-09-11
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