Invention Grant
- Patent Title: Production of trisilylamine from monochlorosilane and ammonia by use of inert solvent
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Application No.: US14212341Application Date: 2014-03-14
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Publication No.: US09617155B2Publication Date: 2017-04-11
- Inventor: Carl-Friedrich Hoppe , Hartwig Rauleder , Christian Goetz
- Applicant: Carl-Friedrich Hoppe , Hartwig Rauleder , Christian Goetz
- Applicant Address: DE Essen
- Assignee: Evonik Degussa GmbH
- Current Assignee: Evonik Degussa GmbH
- Current Assignee Address: DE Essen
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: DE102011088814 20111216
- Main IPC: C01B21/087
- IPC: C01B21/087 ; C01C1/16
Abstract:
The present invention relates to a specific process for producing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention further relates to a plant wherein such a process can be carried out with advantage.
Public/Granted literature
- US20140199227A1 PRODUCTION OF TRISILYLAMINE FROM MONOCHLOROSILANE AND AMMONIA BY USE OF INERT SOLVENT Public/Granted day:2014-07-17
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