Microvalve having improved actuator
Abstract:
A microvalve includes a first plate having a surface defining an actuator cavity. A second plate has a surface that abuts the surface of the first plate and includes a displaceable member that is disposed within the actuator cavity for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve. An actuator is connected to the displaceable member and has only one or two pairs of actuator ribs.
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