Invention Grant
- Patent Title: Sensor element
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Application No.: US14842193Application Date: 2015-09-01
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Publication No.: US09618406B2Publication Date: 2017-04-11
- Inventor: Dietmar Kroeger , Peter Schmid , Ulrich Schmid , Alexander Schricker , Christof Zarfl
- Applicant: PIEZOCRYST ADVANCED SENSORICS GMBH
- Applicant Address: AT Graz
- Assignee: Piezocryst Advanced Sensories GmbH
- Current Assignee: Piezocryst Advanced Sensories GmbH
- Current Assignee Address: AT Graz
- Agency: Dykema Gossett PLLC
- Priority: AT50612/2014 20140905
- Main IPC: G01L1/04
- IPC: G01L1/04 ; G01L1/26 ; G01L9/00 ; G01L19/04 ; G01L1/18 ; G01L1/22

Abstract:
A sensor element (1) includes a substrate (2) and a strain-sensitive element (3) which is preferably applied to the substrate by means of thin-film technology and is used for measuring the deformation of the substrate (2) when pressure is applied or a force is introduced, the strain-sensitive element (3) including XAlOyN1-y, wherein X is a metal with a high melting temperature in the range of greater than 1400° C. and 0
Public/Granted literature
- US20160069758A1 SENSOR ELEMENT Public/Granted day:2016-03-10
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