Invention Grant
- Patent Title: Optomechanical accelerometer
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Application No.: US14379744Application Date: 2013-03-01
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Publication No.: US09618531B2Publication Date: 2017-04-11
- Inventor: Oskar Painter , Martin Winger , Qiang Lin , Alexander Krause , Tim D. Blasius
- Applicant: California Institute of Technology , University of Rochester
- Applicant Address: US CA Pasadena US NY Rochester
- Assignee: CALIFORNIA INSTITUTE OF TECHNOLOGY,UNIVERSITY OF ROCHESTER
- Current Assignee: CALIFORNIA INSTITUTE OF TECHNOLOGY,UNIVERSITY OF ROCHESTER
- Current Assignee Address: US CA Pasadena US NY Rochester
- Agency: Turk IP Law, LLC
- International Application: PCT/US2013/028763 WO 20130301
- International Announcement: WO2013/131067 WO 20130906
- Main IPC: G01P15/08
- IPC: G01P15/08 ; G01P15/093 ; B81B3/00 ; B81C1/00 ; B82Y99/00 ; G01N21/55 ; G01N21/59 ; H01L21/02

Abstract:
Technologies are generally described for operating and manufacturing optomechanical accelerometers. In some examples, an optomechanical accelerometer device is described that uses a cavity resonant displacement sensor based on a zipper photonic crystal nano-cavity to measure the displacement of an integrated test mass generated by acceleration applied to the chip. The cavity-resonant sensor may be fully integrated on-chip and exhibit an enhanced displacement resolution due to its strong optomechanical coupling. The accelerometer structure may be fabricated in a silicon nitride thin film and constitute a rectangular test mass flexibly suspended on high aspect ratio inorganic nitride nano-tethers under high tensile stress. By increasing the mechanical Q-factors through adjustment of tether width and tether length, the noise-equivalent acceleration (NEA) may be reduced, while maintaining a large operation bandwidth. The mechanical Q-factor may be improved with thinner (e.g.,
Public/Granted literature
- US20150020590A1 OPTOMECHANICAL ACCELEROMETER Public/Granted day:2015-01-22
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