Invention Grant
- Patent Title: Radar systems with dual fiber coupled lasers
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Application No.: US13841021Application Date: 2013-03-15
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Publication No.: US09618619B2Publication Date: 2017-04-11
- Inventor: Mina A. Rezk , Anthony R. Slotwinski , Daniel G. Smith , Eric Peter Goodwin , Alexander Cooper , Thomas M. Hedges
- Applicant: Nikon Corporation , Nikon Metrology NV
- Applicant Address: JP Tokyo BE Leuven
- Assignee: Nikon Corporation,Nikon Metrology NV
- Current Assignee: Nikon Corporation,Nikon Metrology NV
- Current Assignee Address: JP Tokyo BE Leuven
- Agency: Klarquist Sparkman, LLP
- Main IPC: G01S17/32
- IPC: G01S17/32 ; G01S17/66 ; G01S17/42 ; G01S7/481 ; G01S7/497 ; G01S7/491 ; G01B9/02

Abstract:
Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
Public/Granted literature
- US20150268344A1 RADAR SYSTEMS WITH DUAL FIBER COUPLED LASERS Public/Granted day:2015-09-24
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