Invention Grant
- Patent Title: Optical components exposer set having non-spherical component
-
Application No.: US14741550Application Date: 2015-06-17
-
Publication No.: US09618734B2Publication Date: 2017-04-11
- Inventor: Jiun-Woei Huang , Shih-Feng Tseng , Jer-Liang Andrew Yeh
- Applicant: National Applied Research Laboratories
- Applicant Address: TW Hsinchu
- Assignee: NATIONAL APPLIED RESEARCH LABORATORIES
- Current Assignee: NATIONAL APPLIED RESEARCH LABORATORIES
- Current Assignee Address: TW Hsinchu
- Agency: Jackson IPG PLLC
- Agent Demian K. Jackson
- Main IPC: G02B17/00
- IPC: G02B17/00 ; G02B17/08 ; G02B13/18 ; G02B27/00 ; G03F7/20

Abstract:
A common optical components exposer lens set having a single non-spherical surface, comprising a common optical element set, comprising a first, second, and third lens arranged sequentially; a spherical reflecting mirror, arranged below the third spherical lens; and a planar reflecting lens, comprising a first and second planar reflecting, inclinedly arranged above the first lens, so that an equi-multiplication exposer lens set is formed by the spherical mirror set, so as to impinge a pattern on an object onto a photosensitive surface. As such, a single non-spherical surface and overlapping assembly, composed of three lenses having the single non-spherical surface and a spherical reflecting lens and two planar reflecting lenses overlapping together, in which two optical material types are arranged with respect to each other.
Public/Granted literature
- US20160370563A1 Common Optical Elements Exposer Lens Set Having Single Non-Spherical Surface Public/Granted day:2016-12-22
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |