Invention Grant
- Patent Title: Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device
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Application No.: US14553707Application Date: 2014-11-25
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Publication No.: US09618740B2Publication Date: 2017-04-11
- Inventor: Simon Armbruster , Helmut Grutzeck , Joerg Muchow , Frederic Njikam Njimonzie , Johannes Baader , Stefan Pinter , Rainer Straub , Zoltan Lestyan
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agent Gerard Messina
- Priority: DE102013224631 20131129
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
A micromirror for a micromirror device includes: a mirror side; and a back side which is directed away from the mirror side, at least one central area of the back side having at least one surface which is plane parallel to the mirror side, the back side being shaped in such a way that on two opposite sides of the central area, a side area having at least one side surface of the back side in each case, which is curved and/or oriented inclined toward the mirror side borders on the central area of the back side, and a height of the micromirror continuously decreasing starting from the central area along a cross section of the micromirror, which runs through the central area and the two side areas.
Public/Granted literature
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