Invention Grant
- Patent Title: Resist composition and method of forming resist pattern
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Application No.: US12940793Application Date: 2010-11-05
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Publication No.: US09618842B2Publication Date: 2017-04-11
- Inventor: Yoshiyuki Utsumi , Makiko Irie
- Applicant: Yoshiyuki Utsumi , Makiko Irie
- Applicant Address: JP Kawasaki-Shi
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2009-258278 20091111
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/038 ; G03F7/039 ; G03F7/20

Abstract:
A resist composition including a base component that exhibits changed solubility in an alkali developing solution under the action of acid, an acid-generator component that generates acid upon exposure, and a nitrogen-containing organic compound, the acid generator component including an acid generator represented by general formula (b0), the nitrogen-containing organic compound including a compound represented by general formula (d1) or general formula (d2) in which each of R1 and R2 represents an aryl group or an alkyl group, Rf represents a fluorinated alkyl group, X−represents a counter anion, each of R3 and R4 represents an aliphatic hydrocarbon group, R5 represents a hydrocarbon group having 5 or more carbon atoms, and each of R6 and R7 independently represents a hydrogen atom, an aliphatic hydrocarbon group, or —C(═O)—O—R5.
Public/Granted literature
- US20110165512A1 RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN Public/Granted day:2011-07-07
Information query
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