Invention Grant
- Patent Title: Resist composition and method of forming resist pattern
-
Application No.: US13424183Application Date: 2012-03-19
-
Publication No.: US09618843B2Publication Date: 2017-04-11
- Inventor: Jun Iwashita , Kensuke Matsuzawa
- Applicant: Jun Iwashita , Kensuke Matsuzawa
- Applicant Address: JP Kawasaki-Shi
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2011-068798 20110325
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039 ; G03F7/20

Abstract:
A resist composition including: a base component (A) that exhibits changed solubility in a developing solution by action of acid; and an acid generator component (B) that generates acid upon exposure, wherein the base component (A) includes a resin component (A1) containing a structural unit (a0) represented by general formula (a0-1) shown below or general formula (a0-2) shown below; and the acid generator component (B) includes an acid generator (B1) including a compound represented by general formula (b0-1) or (b0-2) shown below.
Public/Granted literature
- US20120251951A1 RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN Public/Granted day:2012-10-04
Information query
IPC分类: