Invention Grant
- Patent Title: Matching process device, matching process method, and inspection device employing same
-
Application No.: US14417425Application Date: 2013-07-16
-
Publication No.: US09619727B2Publication Date: 2017-04-11
- Inventor: Wataru Nagatomo , Yuichi Abe , Hiroyuki Ushiba
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Minato-ku, Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Minato-ku, Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2012-167363 20120727
- International Application: PCT/JP2013/069296 WO 20130716
- International Announcement: WO2014/017337 WO 20140130
- Main IPC: G06K9/32
- IPC: G06K9/32 ; G06T7/00 ; G01N21/956 ; G06K9/62 ; G06K9/00

Abstract:
An inspection device that performs pattern matching on a searched image performs matching between a template image of an inspection object and the searched image by using: a feature region extraction process unit that extracts a feature quantity from the template image acquired for learning; a feature quantity extraction process unit that extracts a feature quantity from the searched image acquired for learning; a mutual feature quantity calculation process unit that calculates a mutual feature quantity of the template image and the searched image from the feature quantity extracted from the template image and the feature quantity extracted from the searched image; a learning process unit that calculates, using a plurality of the mutual feature quantities, a discrimination boundary surface that determines matching success or failure; a process unit that calculates a plurality of the mutual feature quantities from an image acquired from the inspection object; and the plurality of mutual feature quantities and the discrimination boundary surface. Thus, an inspection device can be provided that outputs an accurate matching position in template matching even when there is a large apparent image discrepancy between the template and the searched image.
Public/Granted literature
- US20150199583A1 Matching Process Device, Matching Process Method, and Inspection Device Employing Same Public/Granted day:2015-07-16
Information query