Invention Grant
- Patent Title: Dynamic creation of backup fiducials
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Application No.: US14726573Application Date: 2015-05-31
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Publication No.: US09619728B2Publication Date: 2017-04-11
- Inventor: Reinier Louis Warschauer
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06K9/32 ; G06T7/00
Abstract:
Multiple reference fiducials are formed on a sample on a sample for charged particle beam facilities processing of the sample. As one fiducial is degraded by the charged particle beam, a second fiducial is used to create one or more additional fiducials.
Public/Granted literature
- US20160350614A1 DYNAMIC CREATION OF BACKUP FIDUCIALS Public/Granted day:2016-12-01
Information query
