Invention Grant
- Patent Title: Determining a malfunctioning device in a plasma system
-
Application No.: US14184631Application Date: 2014-02-19
-
Publication No.: US09620337B2Publication Date: 2017-04-11
- Inventor: John C. Valcore, Jr. , Bradford J. Lyndaker , Arthur Sato
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Systems and methods for determining a malfunctioning device in a plasma system, are described. One of the methods includes receiving an indication whether plasma is generated within a plasma chamber of the plasma system. The plasma system includes a processing portion and a power delivery portion. The method further includes determining whether the plasma system operates within constraints in response to receiving the indication that the plasma is generated, determining a value of a variable at an output of the power delivery portion when the processing portion is decoupled from the power delivery portion, and comparing the determined value with a pre-recorded value of the variable. The method includes determining whether the determined value is outside a range of the pre-recorded value and determining that the malfunctioning device within the power delivery portion upon determining that the determined value is outside the range of the pre-recorded value.
Public/Granted literature
- US20140210508A1 Determining A Malfunctioning Device in A Plasma System Public/Granted day:2014-07-31
Information query