Invention Grant
- Patent Title: Production method
-
Application No.: US14669072Application Date: 2015-03-26
-
Publication No.: US09620375B2Publication Date: 2017-04-11
- Inventor: Sergiu Langa , Christian Drabe , Thilo Sandner
- Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Applicant Address: DE Munich
- Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Current Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Current Assignee Address: DE Munich
- Agency: Keating & Bennett, LLP
- Priority: DE102012217793 20120928
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L21/3065 ; B81C1/00 ; G02B26/08
Abstract:
A production methods includes providing a substrate including a lattice plane that extends in a non-symmetrical manner and such that it is offset at an angle α from at least a first or second main surface region of the substrate, the first and second main surface regions extending parallel to each other; anisotropic etching, starting from the first main surface region, into the substrate so as to obtain an etching structure which includes, in a plane extending perpendicularly to the first main surface region, two different etching angles relative to the first main surface region; arranging a cover layer on the first main surface region, so that the cover layer lies against the etching structure in at least some sections; and removing, section-by-section, the material of the substrate starting from the second main surface region in the area of the deformed cover layer, so that the cover layer is exposed in at least one window region.
Public/Granted literature
- US20150200105A1 PRODUCTION METHOD Public/Granted day:2015-07-16
Information query
IPC分类:
