Invention Grant
- Patent Title: Apparatus for handling a semiconductor component
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Application No.: US12722553Application Date: 2010-03-12
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Publication No.: US09620398B2Publication Date: 2017-04-11
- Inventor: Jianping Jin , Lee Kwang Heng
- Applicant: Jianping Jin , Lee Kwang Heng
- Applicant Address: SG Singapore
- Assignee: Semiconductor Technologies & Instruments PTE LTD
- Current Assignee: Semiconductor Technologies & Instruments PTE LTD
- Current Assignee Address: SG Singapore
- Agency: Hauptman Ham, LLP
- Priority: SG200901753 20090313
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/687

Abstract:
An apparatus for handling or transferring a semiconductor component. The apparatus comprises a first structure and a second structure coupled thereto. The first structure and the second structure define a vacuum chamber therebetween. The second structure comprises at least one module coupled thereto. Each module comprises a passageway defined therethrough. Vacuum is applied through the passageway for facilitating pick up of the semiconductor component at a first position and for securing the semiconductor component to the module during displacement of the module from the first position to a second position. The apparatus comprises a plunger. Displacement of the plunger from a retracted position to an extended position impedes fluid communication between the passageway of the module and the chamber. Displacement of the plunger to the extended position further causes purging of air through the passageway of the module to thereby detach the semiconductor component from the module. A method for transferring the semiconductor component using the apparatus is also provided by the present invention.
Public/Granted literature
- US20100232915A1 Apparatus For Handling A Semiconductor Component Public/Granted day:2010-09-16
Information query
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