Invention Grant
- Patent Title: Substrate transfer system, substrate processing system, and substrate transfer robot
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Application No.: US14810408Application Date: 2015-07-27
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Publication No.: US09620405B2Publication Date: 2017-04-11
- Inventor: Masatoshi Furuichi , Yoshiki Kimura
- Applicant: KABUSHIKI KAISHA YASKAWA DENKI
- Applicant Address: JP Kitakyushu-shi
- Assignee: KABUSHIKI KAISHA YASKAWA DENKI
- Current Assignee: KABUSHIKI KAISHA YASKAWA DENKI
- Current Assignee Address: JP Kitakyushu-shi
- Agency: Mori & Ward, LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/687

Abstract:
A substrate transfer robot is disposed in a robot installment area defined between a first apparatus and a second apparatus including an opening. The first apparatus includes a first wall, the second apparatus including a second wall. The first apparatus accommodates the substrate at each of a lowest height position and a highest height position. The substrate transfer robot includes a base stationary, a hand configured, and an arm. The arm is rotatably mounted to the base to move the hand. The hand and the arm move in a height direction between a movable range defined between a lowest position and a highest position. The arm rotates with partially entering the opening when the substrate transfer robot takes out the substrate from the first apparatus. The substrate is accommodated at each of the lowest height position and the highest height position.
Public/Granted literature
- US20150332946A1 SUBSTRATE TRANSFER SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE TRANSFER ROBOT Public/Granted day:2015-11-19
Information query
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