Invention Grant
- Patent Title: Semiconductor apparatus, stacked semiconductor apparatus, encapsulated stacked-semiconductor apparatus, and method for manufacturing the same
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Application No.: US15163016Application Date: 2016-05-24
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Publication No.: US09620429B2Publication Date: 2017-04-11
- Inventor: Kyoko Soga , Satoshi Asai , Katsuya Takemura
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2015-116000 20150608
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L23/29 ; H01L25/065 ; H01L25/00 ; H01L21/56 ; G03F7/20 ; G03F7/40 ; G03F7/075 ; C08G59/32 ; C08G59/62 ; C08K5/13 ; C08L63/00 ; H01L23/498 ; C08G77/52 ; C08G77/60 ; C09D183/14 ; C09D183/16 ; H01L21/48 ; H01L25/10

Abstract:
The present invention is a semiconductor apparatus including a semiconductor device, an on-semiconductor-device metal pad and a metal interconnect each electrically connected to the semiconductor device, a through electrode and a solder bump each electrically connected to the metal interconnect, a first photosensitive insulating layer formed on the semiconductor device, and a second photosensitive insulating layer formed on the first photosensitive insulating layer, in which the first and second photosensitive insulating layers are composed of a photo-curable resin composition containing a silicone polymer compound having an epoxy group-containing repeating unit shown by formula (1) and a phenolic hydroxyl group-containing repeating unit shown by formula (2), a photosensitive acid generator, a solvent, and crosslinking agents. There can be provided a semiconductor apparatus that can be easily placed on a circuit board and stacked by forming a fine electrode on the semiconductor device and providing a through electrode outside the semiconductor device.
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Information query
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