- Patent Title: Semiconductor packaging structure and method for forming the same
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Application No.: US14074637Application Date: 2013-11-07
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Publication No.: US09620468B2Publication Date: 2017-04-11
- Inventor: Chang-Ming Lin , Yu-Juan Tao
- Applicant: TONGFU MICROELECTRONICS CO., LTD.
- Applicant Address: CN Nantong
- Assignee: TONGFU MICROELECTRONICS CO., LTD.
- Current Assignee: TONGFU MICROELECTRONICS CO., LTD.
- Current Assignee Address: CN Nantong
- Agency: Anova Law Group, PLLC
- Priority: CN201210443751 20121108; CN201210444153 20121108
- Main IPC: H01L21/48
- IPC: H01L21/48 ; H01L21/768 ; H01L23/522 ; H01L23/00 ; H01L23/31 ; H01L23/525

Abstract:
Various embodiments provide semiconductor packaging structures and methods for forming the same. In an exemplary method, a chip having a metal interconnect structure thereon can be provided. An insulating layer can be formed on the chip to expose the metal interconnect structure. A columnar electrode can be formed on the metal interconnect structure. A portion of the metal interconnect structure surrounding a bottom of the columnar electrode can be exposed. A diffusion barrier layer can be formed on sidewalls and a top surface of the columnar electrode, and on the exposed portion of the metal interconnect structure surrounding the bottom of the columnar electrode. A solder ball can then be formed on the diffusion barrier layer. The solder ball can wrap at least the sidewalls and the top surface of the columnar electrode.
Public/Granted literature
- US20140124928A1 SEMICONDUCTOR PACKAGING STRUCTURE AND METHOD FOR FORMING THE SAME Public/Granted day:2014-05-08
Information query
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