Invention Grant
- Patent Title: Embedded SONOS based memory cells
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Application No.: US15146753Application Date: 2016-05-04
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Publication No.: US09620516B2Publication Date: 2017-04-11
- Inventor: Krishnaswamy Ramkumar , Igor G. Kouznetsov , Venkatraman Prabhakar
- Applicant: Cypress Semiconductor Corporation
- Applicant Address: US CA San Jose
- Assignee: Cypress Semiconductor Corporation
- Current Assignee: Cypress Semiconductor Corporation
- Current Assignee Address: US CA San Jose
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11568 ; H01L29/66 ; H01L29/792 ; H01L27/11573 ; H01L29/167 ; H01L29/423 ; H01L29/49 ; H01L29/51 ; H01L27/1157 ; H01L21/8234 ; H01L27/088 ; H01L29/78

Abstract:
Memory devices and methods for forming the same are disclosed. In one embodiment, the device includes a non-volatile memory (NVM) transistor formed in a first region of a substrate, the NVM transistor comprising a channel and a gate stack on the substrate overlying the channel. The gate stack includes a dielectric layer on the substrate, a charge-trapping layer on the dielectric layer, an oxide layer overlying the charge-trapping layer, a first gate overlying the oxide layer, and a first silicide region overlying the first gate. The device includes a metal-oxide-semiconductor transistor formed in a second region of the substrate comprising a gate oxide overlying the substrate in the second region, a second gate overlying the gate oxide, and a second silicide region overlying the second gate. A strain inducing structure overlies at least the NVM transistor and a surface of the substrate in the first region of the substrate.
Public/Granted literature
- US20160260730A1 Embedded SONOS Based Memory Cells Public/Granted day:2016-09-08
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