Invention Grant
- Patent Title: Metal-insulator-metal (MIM) capacitors and forming methods
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Application No.: US14606265Application Date: 2015-01-27
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Publication No.: US09620582B2Publication Date: 2017-04-11
- Inventor: Ching-Pei Hsieh , Chern-Yow Hsu , Shih-Chang Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L49/02
- IPC: H01L49/02

Abstract:
The present disclosure relates a metal-insulator-metal (MIM) capacitor. In some embodiments, the MIM capacitor has a capacitor bottom metal (CBM) electrode arranged over a semiconductor substrate. The MIM capacitor has a high-k dielectric disposed over the CBM electrode and a capacitor top metal (CTM) electrode arranged over the high-k dielectric layer. The MIM capacitor has a dummy structure that is disposed vertically over the high-k dielectric layer and laterally apart from the CTM electrode. The dummy structure includes a conductive body having a same material as the CTM electrode.
Public/Granted literature
- US20160218172A1 METAL-INSULATOR-METAL (MIM) CAPACITORS AND FORMING METHODS Public/Granted day:2016-07-28
Information query
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