Invention Grant
- Patent Title: Method to fabricate micro and nano diamond devices
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Application No.: US14490518Application Date: 2014-09-18
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Publication No.: US09620596B2Publication Date: 2017-04-11
- Inventor: Alfredo M. Morales , Richard J. Anderson , Nancy Y. C. Yang , Jack L. Skinner , Michael J. Rye
- Applicant: Sandia Corporation
- Applicant Address: US NM Albuquerque
- Assignee: Sandia Corporation
- Current Assignee: Sandia Corporation
- Current Assignee Address: US NM Albuquerque
- Agency: Blakely, Sokoloff, Taylor & Zafman, LLP
- Main IPC: H01L29/16
- IPC: H01L29/16 ; H01L29/04 ; H01L29/06 ; H01L29/66 ; H01L29/775 ; H01L21/04
Abstract:
A method including forming a diamond material on the surface of a substrate; forming a first contact and a separate second contact; and patterning the diamond material to form a nanowire between the first contact and the second contact. An apparatus including a first contact and a separate second contact on a substrate; and a nanowire including a single crystalline or polycrystalline diamond material on the substrate and connected to each of the first contact and the second contact.
Public/Granted literature
- US20150041810A1 METHOD TO FABRICATE MICRO AND NANO DIAMOND DEVICES Public/Granted day:2015-02-12
Information query
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