Invention Grant
- Patent Title: Semiconductor device structure and method
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Application No.: US14713978Application Date: 2015-05-15
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Publication No.: US09620605B2Publication Date: 2017-04-11
- Inventor: Chi-Te Liang , Minghwei Hong , Fan-Hung Liu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd. , National Taiwan University
- Applicant Address: TW Hsin-Chu TW Taipei
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.,National Taiwan University
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.,National Taiwan University
- Current Assignee Address: TW Hsin-Chu TW Taipei
- Agency: Slater Matsil, LLP
- Main IPC: H01L29/43
- IPC: H01L29/43 ; H01L29/423 ; H01L29/778 ; H01L29/66

Abstract:
A multi-layered semiconductor device and method of manufacture are provided. In an embodiment a first semiconductor layer, a first insulator layer, a second semiconductor layer, a second insulator layer, and a third semiconductor layer are formed over a substrate. A first transistor comprises the first semiconductor layer, the first insulator layer, and the second semiconductor layer, and a second transistor comprises the second semiconductor layer, the second insulator layer, and the third semiconductor layer.
Public/Granted literature
- US20160336416A1 Semiconductor Device Structure and Method Public/Granted day:2016-11-17
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