- Patent Title: Intergrated circuit devices including an interfacial dipole layer
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Application No.: US14625974Application Date: 2015-02-19
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Publication No.: US09620612B2Publication Date: 2017-04-11
- Inventor: Jeffrey Junhao Xu , Xia Li
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agency: Toler Law Group, PC
- Main IPC: H01L29/51
- IPC: H01L29/51 ; H01L29/66 ; H01L29/78 ; H01L27/08 ; H01L27/088 ; H01L21/28 ; H01L27/11592 ; G11C11/22

Abstract:
An integrated circuit device includes a first transistor structure formed in a memory region (e.g., an embedded memory region) of a die. The first transistor structure includes a substrate (e.g., a planar substrate of a planar FET or a fin of a FinFET) and a first gate. The first gate includes a dipole layer proximate to the substrate and a barrier layer proximate to the dipole layer. The integrated circuit device further includes a second transistor structure formed in a logic device region of the die. The second transistor structure includes a second gate that includes an interface layer, a dielectric layer, and a cap layer. The dielectric layer is formed between the cap layer and the interface layer.
Public/Granted literature
- US20160247893A1 SYSTEMS AND METHODS OF FORMING AN INTERFACIAL DIPOLE LAYER Public/Granted day:2016-08-25
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