Invention Grant
- Patent Title: FinFET with isolation
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Application No.: US14103780Application Date: 2013-12-11
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Publication No.: US09620642B2Publication Date: 2017-04-11
- Inventor: Eng Huat Toh , Shyue Seng Tan , Elgin Kiok Boone Quek
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Horizon IP Pte. Ltd.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L21/762

Abstract:
Devices and methods for forming a device are presented. The method includes providing a substrate prepared with a device region. A fin is formed in the device region. The fin includes top and bottom portions. An isolation layer is formed on the substrate. The isolation layer has a top isolation surface disposed below a top fin surface, leaving an upper fin portion exposed. At least one isolation buffer is formed in the bottom fin portion, leaving the top fin portion crystalline, the top fin portion serves as a body of a fin type transistor. Source/drain (S/D) regions are formed in the top portions of the fin and a gate wrapping around the fin is provided.
Public/Granted literature
- US20150162436A1 FINFET WITH ISOLATION Public/Granted day:2015-06-11
Information query
IPC分类: