Invention Grant
- Patent Title: Memory cells formed with sealing material
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Application No.: US14820046Application Date: 2015-08-06
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Publication No.: US09620713B2Publication Date: 2017-04-11
- Inventor: Fabio Pellizzer
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
Memory cells, arrays of memory cells, and methods of forming the same with sealing material on sidewalls thereof are disclosed herein. One example of forming a memory cell includes forming a stack of materials, forming a trench to a first depth in the stack of materials such that a portion of at least one of the active storage element material and the active select device material is exposed on sidewalls of the trench. A sealing material is formed on the exposed portion of the at least one of the active storage element material and the active select device material and the trench is deepened such that a portion of the other of the at least one of the active storage element material and the active select device material is exposed on the sidewalls of the trench.
Public/Granted literature
- US20150357565A1 MEMORY CELLS AND MEMORY CELL FORMATION METHODS USING SEALING MATERIAL Public/Granted day:2015-12-10
Information query
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